Inventor · disambiguated record

Hung Yueh Lu

Also filed as: LU HUNG YUEH

2 granted patents·4 citations·filing 2000–2005

40Inventor score

Technology areasH10P

Files withPROMOS TECHNOLOGIES INC2

Top patents by PatentIndex Score

2 records

0148US6399509B1Defects reduction for a metal etcherPROMOS TECHNOLOGIES INC·Filed 2000·Granted Jun 4, 2002·4 cites·16 claims
0233US7344995B2Method for preparing a structure with high aspect ratioPROMOS TECHNOLOGIES INC·Filed 2005·Granted Mar 18, 2008·0 cites·11 claims

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