Inventor · disambiguated record
Giorgio G. Via
Also filed as: VIA GIORGIO G
5 granted patents·139 citations·filing 1984–1992
83Inventor score
Files withIBM5
Top patents by PatentIndex Score
5 records- 0184US5087537ALithography imaging tool and related photolithographic processesIBM·Filed 1989·Granted Feb 11, 1992·55 cites·18 claims
- 0265US4567132AMulti-level resist image reversal lithography processIBM·Filed 1984·Granted Jan 28, 1986·33 cites·2 claims
- 0349US5024896ACollimated metal depositionIBM·Filed 1989·Granted Jun 18, 1991·16 cites·19 claims
- 0447US5258264AProcess of forming a dual overhang collimated lift-off stencil with subsequent metal depositionIBM·Filed 1992·Granted Nov 2, 1993·18 cites·14 claims
- 0547US4745045AMethod for improving resolution in microelectronic circuits using photoresist overlayer by using thermally processed polyimide underlayer formed from positive photoresist and polyamic acidIBM·Filed 1986·Granted May 17, 1988·17 cites·1 claims
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