Inventor · disambiguated record
Andrew John Harpham
Also filed as: HARPHAM ANDREW JOHN
7 granted patents·1 pending application·51 citations·filing 2004–2018
85Inventor score
Top patents by PatentIndex Score
8 records- 0188US8830440B2Vacuum system for immersion photolithographyHARPHAM ANDREW JOHN·Filed 2011·Granted Sep 9, 2014·5 cites·22 claims
- 0287US9857699B2Vacuum system for immersion photolithographyASML NETHERLANDS BV·Filed 2016·Granted Jan 2, 2018·2 cites·20 claims
- 0383US8164734B2Vacuum system for immersion photolithographyHARPHAM ANDREW JOHN·Filed 2008·Granted Apr 24, 2012·9 cites·20 claims
- 0478US7481867B2Vacuum system for immersion photolithographyEDWARDS LTD·Filed 2004·Granted Jan 27, 2009·17 cites·25 claims
- 0577US9507270B2Vacuum system for immersion photolithographyASML NETHERLANDS BV·Filed 2014·Granted Nov 29, 2016·1 cites·21 claims
- 0667US7368000B2Treatment of effluent gasesBOC GROUP PLC·Filed 2004·Granted May 6, 2008·17 cites·18 claims
- 0765US10168624B2Vacuum system for immersion photolithographyASML NETHERLANDS BV·Filed 2017·Granted Jan 1, 2019·0 cites·20 claims
- 0865US2019094715A1Vacuum system for immersion photolithographyASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
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