Inventor · disambiguated record
Duk-Min Ahn
Also filed as: AHN DUK-MIN
2 granted patents·1 pending application·19 citations·filing 2003–2006
59Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0162US7166183B2Apparatus and method for treating edge of substrateSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jan 23, 2007·10 cites·19 claims
- 0259US7255115B2Apparatus for cleaning semiconductor wafersSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 14, 2007·9 cites·17 claims
- 0337US2006169300A1Method of and apparatus for heating liquid used in the manufacturing of semiconductor devices, and method of processing substrates with heated liquidAHN DUK-MIN·Filed 2006·Application pending·0 cites
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