Inventor · disambiguated record
Harald Seidl
Also filed as: SEIDL HARALD
43 granted patents·21 pending applications·493 citations·filing 2001–2014
98Inventor score
Top patents by PatentIndex Score
64 records- 0196US6835417B2Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processesINFINEON TECHNOLOGIES AG·Filed 2003·Granted Dec 28, 2004·115 cites·13 claims
- 0295US7420199B2Resistivity changing memory cell having nanowire electrodeINFINEON TECHNOLOGIES AG·Filed 2005·Granted Sep 2, 2008·40 cites·18 claims
- 0395US7317201B2Method of producing a microelectronic electrode structure, and microelectronic electrode structureINFINEON TECHNOLOGIES AG·Filed 2005·Granted Jan 8, 2008·43 cites·10 claims
- 0491US7323357B2Method for manufacturing a resistively switching memory cell and memory device based thereonQIMONDA AG·Filed 2005·Granted Jan 29, 2008·22 cites·18 claims
- 0589US8084190B2Process for producing sublithographic structuresGUTSCHE MARTIN·Filed 2009·Granted Dec 27, 2011·13 cites·13 claims
- 0689US6853023B2Semiconductor memory cell configuration and a method for producing the configurationINFINEON TECHNOLOGIES AG·Filed 2003·Granted Feb 8, 2005·42 cites·8 claims
- 0788US7605090B2Process for producing sublithographic structuresINFINEON TECHNOLOGIES AG·Filed 2006·Granted Oct 20, 2009·11 cites·7 claims
- 0887US7303970B2Method of fabricating dielectric mixed layers and capacitive element and use thereofINFINEON TECHNOLOGIES AG·Filed 2005·Granted Dec 4, 2007·12 cites·2 claims
- 0984US8420526B2Vertical interconnect structure, memory device and associated production methodGUTSCHE MARTIN·Filed 2011·Granted Apr 16, 2013·6 cites·13 claims
- 1082US7112487B2Method for fabricating a stacked capacitor array having a regular arrangement of a plurality of stacked capacitorsINFINEON TECHNOLOGIES AG·Filed 2005·Granted Sep 26, 2006·10 cites·13 claims
- 1181US8525347B2Method for producing chip stacks, and associated chip stacksBARTH HANS-JOACHIM·Filed 2006·Granted Sep 3, 2013·6 cites·8 claims
- 1278US6693016B2Method of fabricating a trench-structure capacitor deviceINFINEON TECHNOLOGIES AG·Filed 2002·Granted Feb 17, 2004·21 cites·14 claims
- 1377US6620724B1Low resistivity deep trench fill for DRAM and EDRAM applicationsINFINEON TECHNOLOGIES AG·Filed 2002·Granted Sep 16, 2003·23 cites·38 claims
- 1473US6953722B2Method for patterning ceramic layersINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 11, 2005·16 cites·11 claims
- 1572US7195973B2Method for fabricating a trench capacitor with an insulation collar and corresponding trench capacitorINFINEON TECHNOLOGIES AG·Filed 2005·Granted Mar 27, 2007·5 cites·11 claims
- 1672US7138677B2Capacitor arrangement with capacitors arranged one in the otherINFINEON TECHNOLOGIES AG·Filed 2004·Granted Nov 21, 2006·17 cites·22 claims
- 1770US8199560B2Memory device comprising select gate including carbon allotropeKAKOSCHKE RONALD·Filed 2011·Granted Jun 12, 2012·2 cites·13 claims
- 1867US9123829B2Method for producing chip stacksINFINEON TECHNOLOGIES AG·Filed 2013·Granted Sep 1, 2015·1 cites·25 claims
- 1967US7626190B2Memory device, in particular phase change random access memory device with transistor, and method for fabricating a memory deviceINFINEON TECHNOLOGIES AG·Filed 2006·Granted Dec 1, 2009·8 cites·8 claims
- 2067US6949269B2Method for producing vertical patterned layers made of silicon dioxideINFINEON TECHNOLOGIES AG·Filed 2003·Granted Sep 27, 2005·10 cites·21 claims
- 2164US7157371B2Barrier layer and a method for suppressing diffusion processes during the production of semiconductor devicesINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jan 2, 2007·9 cites·15 claims
- 2264US6774005B2Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbideINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 10, 2004·9 cites·12 claims
- 2361US7456461B2Stacked capacitor array and fabrication method for a stacked capacitor arrayINFINEON TECHNOLOGIES AG·Filed 2005·Granted Nov 25, 2008·2 cites·14 claims
- 2461US7087485B2Method of fabricating an oxide collar for a trench capacitorINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 8, 2006·7 cites·15 claims
- 2561US7084454B2Nonvolatile integrated semiconductor memoryINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 1, 2006·9 cites·15 claims
- 2660US7186607B2Charge-trapping memory device and method for productionINFINEON TECHNOLOGIES AG·Filed 2005·Granted Mar 6, 2007·2 cites·16 claims
- 2760US7170125B2Capacitor with electrodes made of ruthenium and method for patterning layers made of ruthenium or rutheniumINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jan 30, 2007·8 cites·18 claims
- 2859US7998858B2Vertical interconnect structure, memory device and associated production methodINFINEON TECHNOLOGIES AG·Filed 2006·Granted Aug 16, 2011·1 cites·7 claims
- 2957US7074689B2Method for fabricating a trench capacitor having an insulation collar, which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cellINFINEON TECHNOLOGIES AG·Filed 2004·Granted Jul 11, 2006·7 cites·10 claims
- 3054US6916704B2Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitorINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jul 12, 2005·6 cites·7 claims
- 3152US9177995B2Vertical interconnect structure, memory device and associated production methodGUTSCHE MARTIN·Filed 2012·Granted Nov 3, 2015·0 cites·12 claims
- 3252US9040354B2Chip comprising a fill structureINFINEON TECHNOLOGIES AG·Filed 2014·Granted May 26, 2015·0 cites·28 claims
- 3352US7978504B2Floating gate device with graphite floating gateINFINEON TECHNOLOGIES AG·Filed 2008·Granted Jul 12, 2011·0 cites·10 claims
- 3450US8188569B2Phase change random access memory device with transistor, and method for fabricating a memory deviceSEIDL HARALD·Filed 2006·Granted May 29, 2012·3 cites·25 claims
- 3550US2007134871A1Memory chip having a memory cell with low-temperature layers in the memory trench and fabrication methodTEMMLER DIETMAR·Filed 2007·Application pending·0 cites
- 3649US7176514B2Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate materialINFINEON TECHNOLOGIES AG·Filed 2003·Granted Feb 13, 2007·2 cites·25 claims
- 3747US8704338B2Chip comprising a fill structureMACKH GUNTHER·Filed 2011·Granted Apr 22, 2014·0 cites·19 claims
- 3847US6653185B2Method of providing trench walls by using two-step etching processesINFINEON TECHNOLOGIES AG·Filed 2002·Granted Nov 25, 2003·1 cites·11 claims
- 3944US8049264B2Method for producing a dielectric material on a semiconductor device and semiconductor deviceQIMONDA AG·Filed 2005·Granted Nov 1, 2011·0 cites·12 claims
- 4044US7273790B2Method for fabricating trench capacitor with insulation collar electrically connected to substrate through buried contact, in particular, for a semiconductor memory cellINFINEON TECHNOLOGIES AG·Filed 2004·Granted Sep 25, 2007·2 cites·13 claims
- 4143US6977405B2Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating itINFINEON TECHNOLOGIES AG·Filed 2004·Granted Dec 20, 2005·2 cites·10 claims
- 4242US7312115B2Fabrication method for a semiconductor structure having integrated capacitorsINFINEON TECHNOLOGIES AG·Filed 2005·Granted Dec 25, 2007·0 cites·10 claims
- 4342US2007221613A1Structure for stopping mechanical cracks in a substrate wafer, use of the structure and a method for producing the structureGUTSCHE MARTIN U·Filed 2006·Application pending·0 cites
- 4441US7316951B2Fabrication method for a trench capacitor having an insulation collarINFINEON TECHNOLOGIES AG·Filed 2005·Granted Jan 8, 2008·0 cites·8 claims
- 4541US2006094233A1Device and method for determining an edge coverage during coating processesGUTSCHE MARTIN·Filed 2005·Application pending·0 cites
- 4641US2007052069A1Integrated conductor arrangement and corresponding production methodGUTSCHE MARTIN·Filed 2006·Application pending·0 cites
- 4739US7122423B2Method for fabricating a memory cellINFINEON TECHNOLOGIES AG·Filed 2005·Granted Oct 17, 2006·0 cites·9 claims
- 4839US2007037349A1Method of forming electrodesGUTSCHE MARTIN·Filed 2006·Application pending·0 cites
- 4938US2005173749A1Trench capacitor with insulating collar, and appropriate method of fabricationINFINEON TECHNOLOGIES AG·Filed 2005·Application pending·0 cites
- 5038US2005205917A1Trench capacitor having an insulation collar and corresponding fabrication methodINFINEON TECHNOLOGIES AG·Filed 2005·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
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