Inventor · disambiguated record
Pascal Marsollek
Also filed as: MARSOLLEK PASCAL
4 granted patents·3 citations·filing 2016–2019
59Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0180US10386732B2Bearing assembly for a lithography system, and lithography systemZEISS CARL SMT GMBH·Filed 2018·Granted Aug 20, 2019·3 cites·20 claims
- 0254US10108094B2Projection exposure apparatus with near-field manipulatorZEISS CARL SMT GMBH·Filed 2016·Granted Oct 23, 2018·0 cites·22 claims
- 0353US10025200B2Optimum arrangement of actuator and sensor points on an optical elementZEISS CARL SMT GMBH·Filed 2016·Granted Jul 17, 2018·0 cites·20 claims
- 0451US11169359B2Method for positioning a component of an optical systemZEISS CARL SMT GMBH·Filed 2019·Granted Nov 9, 2021·0 cites·20 claims
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