Inventor · disambiguated record
Hideyuki Tsurumaki
Also filed as: TSURUMAKI HIDEYUKI
5 granted patents·142 citations·filing 1995–2015
78Inventor score
Top patents by PatentIndex Score
5 records- 0186US7619230B2Charged particle beam writing method and apparatus and readable storage mediumNUFLARE TECHNOLOGY INC·Filed 2006·Granted Nov 17, 2009·10 cites·15 claims
- 0285US5822450AMethod for monitoring equipment state by distribution measurement data, and equipment monitoring apparatusTOSHIBA KK·Filed 1995·Granted Oct 13, 1998·121 cites·28 claims
- 0384US7608845B2Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effectNUFLARE TECHNOLOGY INC·Filed 2007·Granted Oct 27, 2009·11 cites·9 claims
- 0438US9460892B2Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 4, 2016·0 cites·15 claims
- 0533US9589766B2Apparatus and method for calculating drawing speeds of a charged particle beamNUFLARE TECHNOLOGY INC·Filed 2015·Granted Mar 7, 2017·0 cites·14 claims
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