Inventor · disambiguated record
Jonathan Smyka
Also filed as: SMYKA JONATHAN · SMYKA JONATHAN W
14 granted patents·1 pending application·301 citations·filing 2000–2025
93Inventor score
Top patents by PatentIndex Score
15 records- 0198US9947514B2Plasma RF bias cancellation systemMKS INSTR INC·Filed 2016·Granted Apr 17, 2018·42 cites·33 claims
- 0297US11935726B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2021·Granted Mar 19, 2024·6 cites·31 claims
- 0397US11315757B2Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applicationsMKS INSTR INC·Filed 2020·Granted Apr 26, 2022·7 cites·39 claims
- 0497US10049857B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2015·Granted Aug 14, 2018·47 cites·28 claims
- 0596US7728602B2Harmonic derived arc detectorMKS INSTR INC·Filed 2007·Granted Jun 1, 2010·102 cites·33 claims
- 0694US11158488B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2019·Granted Oct 26, 2021·13 cites·36 claims
- 0793US8890537B2Harmonic derived arc detectorVALCORE JR JOHN·Filed 2010·Granted Nov 18, 2014·66 cites·45 claims
- 0889US11715624B2Adaptive pulse shaping with post match sensorMKS INSTR INC·Filed 2021·Granted Aug 1, 2023·1 cites·29 claims
- 0989US9136093B2Synchronization of RF pulsing with RF metrology, processing, and controlMKS INSTR INC·Filed 2013·Granted Sep 15, 2015·9 cites·37 claims
- 1085US2025299922A1Adaptive Pulse Shaping with Post-Match SensorMKS INC·Filed 2025·Application pending·0 cites
- 1182US12362146B2Adaptive pulse shaping with post match sensorMKS INSTR INC·Filed 2023·Granted Jul 15, 2025·0 cites·25 claims
- 1280US10727027B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2019·Granted Jul 28, 2020·1 cites·23 claims
- 1373US11367592B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2020·Granted Jun 21, 2022·0 cites·20 claims
- 1459US6760367B1Internal noise immune data communications schemeENI TECHNOLOGY INC·Filed 2000·Granted Jul 6, 2004·6 cites·16 claims
- 1539US9214909B2High reliability RF generator architectureRADOMSKI AARON T·Filed 2006·Granted Dec 15, 2015·1 cites·13 claims
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