Inventor · disambiguated record
Uwe Stamm
Also filed as: STAMM UWE · STAMM UWE BRUNO HEINI · STAMM UWE DR
64 granted patents·1 pending application·1,528 citations·filing 1994–2012
99Inventor score
Files withLAMBDA PHYSIK AG40LAMBDA PHYSIK GMBH13LOOPSTRA ERIK ROELOF3XTREME TECH GMBH3ASML NETHERLANDS BV1
Top patents by PatentIndex Score
65 records- 0195US6389045B1Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasersLAMBDA PHYSIK AG·Filed 2000·Granted May 14, 2002·87 cites·39 claims
- 0293US6243405B1Very stable excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2000·Granted Jun 5, 2001·61 cites·59 claims
- 0392US6002697ADiode pumped laser with frequency conversion into UV and DUV rangeLAMBDA PHYSIK GMBH·Filed 1998·Granted Dec 14, 1999·125 cites·34 claims
- 0490US6381256B1Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2000·Granted Apr 30, 2002·34 cites·91 claims
- 0589US6560254B2Line-narrowing module for high power laserLAMBDA PHYSIK AG·Filed 2002·Granted May 6, 2003·27 cites·24 claims
- 0689US6272158B1Method and apparatus for wavelength calibrationLAMBDA PHYSIK AG·Filed 2000·Granted Aug 7, 2001·24 cites·39 claims
- 0787US6882704B2Radiation source for generating extreme ultraviolet radiationXTREME TECH GMBH·Filed 2003·Granted Apr 19, 2005·43 cites·30 claims
- 0887US6516013B1Laser beam monitoring apparatus and methodLAMBDA PHYSIK AG·Filed 2000·Granted Feb 4, 2003·30 cites·26 claims
- 0987US6154470AMolecular fluorine (F2) laser with narrow spectral linewidthLAMBA PHYSIK GMBH·Filed 1999·Granted Nov 28, 2000·83 cites·33 claims
- 1087US5946337AHybrid laser resonator with special line narrowingLAMBDA PHYSIK GMBH·Filed 1998·Granted Aug 31, 1999·69 cites·41 claims
- 1186US6807205B1Precise monitor etalon calibration techniqueLAMBDA PHYSIK AG·Filed 2001·Granted Oct 19, 2004·26 cites·19 claims
- 1286US6160832AMethod and apparatus for wavelength calibrationLAMBDA PHYSIK GMBH·Filed 1999·Granted Dec 12, 2000·52 cites·17 claims
- 1386US6014206AStabilization of angular and lateral laser beam positionLAMBDA PHYSIK GMBH·Filed 1998·Granted Jan 11, 2000·79 cites·43 claims
- 1485US6894285B2Arrangement for monitoring the energy radiated by an EUV radiation sourceXTREME TECH GMBH·Filed 2003·Granted May 17, 2005·23 cites·13 claims
- 1585US6490306B2Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2002·Granted Dec 3, 2002·18 cites·28 claims
- 1684US6603788B1Resonator for single line selectionLAMBDA PHYSIK AG·Filed 2000·Granted Aug 5, 2003·22 cites·67 claims
- 1782US6414978B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Jul 2, 2002·14 cites·11 claims
- 1881US7266137B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2005·Granted Sep 4, 2007·5 cites·28 claims
- 1981US6608848B2Method and apparatus for wavelength calibrationLAMBDA PHYSIK AG·Filed 2001·Granted Aug 19, 2003·14 cites·43 claims
- 2081US6426966B1Molecular fluorine (F2) laser with narrow spectral linewidthLAMBDA PHYSIK AG·Filed 2000·Granted Jul 30, 2002·18 cites·26 claims
- 2181US5663973ATunable narrowband source of a coherent radiationLAMBDA PHYSIK GMBH·Filed 1996·Granted Sep 2, 1997·73 cites·12 claims
- 2280US6463086B1Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2002·Granted Oct 8, 2002·14 cites·25 claims
- 2379US9110377B2Lithographic apparatus, EUV radiation generation apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2011·Granted Aug 18, 2015·5 cites·15 claims
- 2479US8547525B2EUV radiation generation apparatusLOOPSTRA ERIK ROELOF·Filed 2010·Granted Oct 1, 2013·5 cites·19 claims
- 2578US6757315B1Corona preionization assembly for a gas laserLAMBDA PHYSIK AG·Filed 2000·Granted Jun 29, 2004·21 cites·50 claims
- 2677US6815900B2Radiation source with high average EUV radiation outputXTREME TECHNOLOGIES GBMH·Filed 2003·Granted Nov 9, 2004·29 cites·37 claims
- 2777US6456643B1Surface preionization for gas lasersLAMBDA PHYSIK AG·Filed 2000·Granted Sep 24, 2002·15 cites·54 claims
- 2877US6424666B1Line-narrowing module for high power laserLAMBDA PHYSIK AG·Filed 2000·Granted Jul 23, 2002·12 cites·32 claims
- 2976US7619232B2Method and device for producing extreme ultraviolet radiation or soft X-ray radiationXTREME TECH GMBH·Filed 2003·Granted Nov 17, 2009·20 cites·29 claims
- 3075US8368040B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2010·Granted Feb 5, 2013·4 cites·12 claims
- 3175US5659419ATunable narrowband optical parametrical oscillatorLAMBDA PHYSIK GMBH·Filed 1995·Granted Aug 19, 1997·50 cites·9 claims
- 3274US6650679B1Preionization arrangement for gas laserLAMBDA PHYSIK AG·Filed 1999·Granted Nov 18, 2003·28 cites·48 claims
- 3374US6466599B1Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 1999·Granted Oct 15, 2002·28 cites·24 claims
- 3473US6556609B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Apr 29, 2003·8 cites·33 claims
- 3573US6393040B1Molecular fluorine (F2) excimer laser with reduced coherence lengthLAMBDA PHYSIK AG·Filed 2000·Granted May 21, 2002·11 cites·62 claims
- 3673US6038240AMethod and solid-state laser system for generating laser pulses with a variable pulse repetition frequency and constant beam characteristicsLAMBDA PHYSIK GMBH·Filed 1998·Granted Mar 14, 2000·40 cites·10 claims
- 3771US6822977B1Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laserLAMBDA PHYSIK AG·Filed 2002·Granted Nov 23, 2004·10 cites·32 claims
- 3869US6269110B1Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption linesLAMBDA PHYSIK AG·Filed 1998·Granted Jul 31, 2001·29 cites·16 claims
- 3968US6862307B2Electrical excitation circuit for a pulsed gas laserLAMBDA PHYSIK AG·Filed 2001·Granted Mar 1, 2005·11 cites·49 claims
- 4067US6717973B2Wavelength and bandwidth monitor for excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Apr 6, 2004·8 cites·84 claims
- 4167US6490307B1Method and procedure to automatically stabilize excimer laser output parametersLAMBDA PHYSIK AG·Filed 1999·Granted Dec 3, 2002·29 cites·92 claims
- 4266US6404795B1Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption linesLAMBDA PHYSIK AG·Filed 2001·Granted Jun 11, 2002·7 cites·25 claims
- 4365US6546037B2Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2002·Granted Apr 8, 2003·7 cites·8 claims
- 4464US6618403B2Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laserLAMBDA PHYSIK AG·Filed 2001·Granted Sep 9, 2003·8 cites·20 claims
- 4563US6965624B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2003·Granted Nov 15, 2005·7 cites·30 claims
- 4662US7075963B2Tunable laser with stabilized gratingLAMBDA PHYSIK AG·Filed 2001·Granted Jul 11, 2006·6 cites·39 claims
- 4762US6430205B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Aug 6, 2002·4 cites·16 claims
- 4862US6028870ASolid state laser and a method of adjusting the pulse energy of a solid state laserLAMBDA PHYSIK GMBH·Filed 1997·Granted Feb 22, 2000·26 cites·31 claims
- 4962US5671241ATunable source of narrowband coherent radiationLAMBDA PHYSIK GMBH·Filed 1996·Granted Sep 23, 1997·27 cites·6 claims
- 5061US9632419B2Radiation sourceVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Granted Apr 25, 2017·2 cites·23 claims
Showing the top 50 of 65 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →