Inventor · disambiguated record
Tatsuya Senga
Also filed as: SENGA TATSUYA
8 granted patents·1 pending application·222 citations·filing 1998–2016
85Inventor score
Top patents by PatentIndex Score
9 records- 0195US6749714B1Polishing body, polisher, polishing method, and method for producing semiconductor deviceNIKON CORP·Filed 2000·Granted Jun 15, 2004·66 cites·12 claims
- 0295US6458014B1Polishing body, polishing apparatus, polishing apparatus adjustment method, polished film thickness or polishing endpoint measurement method, and semiconductor device manufacturing methodNIKON CORP·Filed 2001·Granted Oct 1, 2002·125 cites·31 claims
- 0388US11219849B2Solid-liquid separator and solid-liquid separation systemTSURUMI MFG·Filed 2016·Granted Jan 11, 2022·4 cites·8 claims
- 0479US6520895B2Polishing device and polishing pad component exchange device and methodNIKON CORP·Filed 2001·Granted Feb 18, 2003·22 cites·20 claims
- 0558US7686673B2Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage mediumNIKON CORP·Filed 2002·Granted Mar 30, 2010·5 cites·29 claims
- 0653US9046279B2Light condensing device, photovoltaic power generation device and photo-thermal conversion deviceNIKON CORP·Filed 2014·Granted Jun 2, 2015·0 cites·13 claims
- 0739US9031687B2Method for predicting worked shape, method for determining working conditions, working method, working system, semiconductor device manufacturing method, computer program and computer program storage mediumSENGA TATSUYA·Filed 2010·Granted May 12, 2015·0 cites·6 claims
- 0839US7203564B2Treatment condition decision method, treatment condition decision system, treatment system, treatment condition decision calculator program, program recording medium, and semiconductor device manufacturing methodNIKON CORP·Filed 2004·Granted Apr 10, 2007·0 cites·21 claims
- 0926US2001015036A1Maximizes a passenger viewing areaTOYODA AUTOMATIC LOOM WORKS·Filed 1998·Application pending·0 cites
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