Inventor · disambiguated record
Shigeo Ashigaki
Also filed as: ASHIGAKI SHIGEO
7 granted patents·4 pending applications·43 citations·filing 1995–2007
83Inventor score
Top patents by PatentIndex Score
11 records- 0182US7674710B2Method of integrating metal-containing films into semiconductor devicesTOKYO ELECTRON LTD·Filed 2006·Granted Mar 9, 2010·10 cites·29 claims
- 0267US8394231B2Plasma process device and plasma process methodTAKATSUKI KOICHI·Filed 2007·Granted Mar 12, 2013·3 cites·18 claims
- 0352US2007158027A1Plasma treatment deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0444US7897498B2Method for manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2005·Granted Mar 1, 2011·0 cites·9 claims
- 0543US6331739B1Fuse in top level metal and in a step, process of making and process of trimmingTEXAS INSTRUMENTS INC·Filed 1997·Granted Dec 18, 2001·10 cites·15 claims
- 0640US2007184379A1Peeling-off method and reworking method of resist filmTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0737US5872060ASemiconductor device manufacturing methodTEXAS INSTRUMENTS INC·Filed 1996·Granted Feb 16, 1999·7 cites·11 claims
- 0837US5650355AProcess of making and process of trimming a fuse in a top level metal and in a stepTEXAS INSTRUMENTS INC·Filed 1995·Granted Jul 22, 1997·7 cites·11 claims
- 0937US2004127033A1Plasma processing device and plasma processing methodFiled 2002·Application pending·0 cites
- 1036US5946591AMethod of making a semiconductor device having a flat surfaceTEXAS INSTRUMENTS INC·Filed 1995·Granted Aug 31, 1999·6 cites·15 claims
- 1136US2004159286A1Plasma treatment deviceFiled 2002·Application pending·0 cites
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