Inventor · disambiguated record
Alok Mahadeva
Also filed as: MAHADEVA ALOK
1 granted patent·2 pending applications·0 citations·filing 2021–2025
13Inventor score
Technology areasH10P
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0160US12215420B2Pedestal thermal profile tuning using multiple heated zones and thermal voidsLAM RES CORP·Filed 2021·Granted Feb 4, 2025·0 cites·21 claims
- 0259US2025179633A1Pedestal thermal profile tuning using multiple heated zones and thermal voidLAM RES CORP·Filed 2025·Application pending·0 cites
- 0341US2023260814A1Exclusion ring for substrate processingLAM RES CORP·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →