Inventor · disambiguated record
Andrew Neureuther
Also filed as: NEUREUTHER ANDREW · NEUREUTHER ANDREW R
5 granted patents·269 citations·filing 1992–2006
84Inventor score
Files withUNIV CALIFORNIA5
Top patents by PatentIndex Score
5 records- 0195US5326659AMethod for making masksUNIV CALIFORNIA·Filed 1992·Granted Jul 5, 1994·127 cites·11 claims
- 0291US7030997B2Characterizing aberrations in an imaging lens and applications to visual testing and integrated circuit mask analysisUNIV CALIFORNIA·Filed 2002·Granted Apr 18, 2006·85 cites·25 claims
- 0387US6686132B2Method and apparatus for enhancing resist sensitivity and resolution by application of an alternating electric field during post-exposure bakeUNIV CALIFORNIA·Filed 2001·Granted Feb 3, 2004·45 cites·61 claims
- 0477US7224458B2Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systemsUNIV CALIFORNIA·Filed 2006·Granted May 29, 2007·9 cites·9 claims
- 0571US7648802B2Phase shifting test mask patterns for characterizing illumination and mask quality in image forming optical systemsUNIV CALIFORNIA·Filed 2005·Granted Jan 19, 2010·3 cites·5 claims
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