Inventor · disambiguated record
Peter Danny Van Voorst
Also filed as: VAN VOORST PETER DANNY
9 granted patents·1 pending application·13 citations·filing 2016–2019
81Inventor score
Files withASML NETHERLANDS BV10
Top patents by PatentIndex Score
10 records- 0189US10451559B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2018·Granted Oct 22, 2019·3 cites·13 claims
- 0288US10330606B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2017·Granted Jun 25, 2019·3 cites·12 claims
- 0383US10185224B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Jan 22, 2019·3 cites·20 claims
- 0481US10725381B2Optical systems, metrology apparatus and associated methodASML NETHERLANDS BV·Filed 2018·Granted Jul 28, 2020·3 cites·15 claims
- 0573US10670974B2Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrateASML NETHERLANDS BV·Filed 2018·Granted Jun 2, 2020·1 cites·16 claims
- 0659US11815402B2Wavefront sensor and associated metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Nov 14, 2023·0 cites·15 claims
- 0757US11129266B2Optical system, metrology apparatus and associated methodASML NETHERLANDS BV·Filed 2019·Granted Sep 21, 2021·0 cites·20 claims
- 0841US11243470B2Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 8, 2022·0 cites·26 claims
- 0940US2019049861A1Methods and Apparatus for Determining the Position of a Spot of Radiation, Inspection Apparatus, Device Manufacturing MethodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 1039US9811001B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Nov 7, 2017·0 cites·20 claims
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