Inventor · disambiguated record
Toshifumi Tachikawa
Also filed as: TACHIKAWA TOSHIFUMI
5 granted patents·255 citations·filing 2012–2017
85Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0197US10593519B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 17, 2020·45 cites·7 claims
- 0297US9754768B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Sep 5, 2017·59 cites·10 claims
- 0396US10109461B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 23, 2018·41 cites·12 claims
- 0496US9734992B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Aug 15, 2017·43 cites·12 claims
- 0596US9355822B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted May 31, 2016·67 cites·7 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →