Inventor · disambiguated record
Hiroyuki Yokohara
Also filed as: YOKOHARA HIROYUKI
8 granted patents·3 pending applications·5 citations·filing 1989–2022
75Inventor score
Top patents by PatentIndex Score
11 records- 0182US11193200B2PVD processing method and PVD processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Dec 7, 2021·1 cites·8 claims
- 0270US11417504B2Stage device and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 16, 2022·1 cites·19 claims
- 0363US10254693B2Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped memberTOKYO ELECTRON LTD·Filed 2015·Granted Apr 9, 2019·1 cites·11 claims
- 0452US12077848B2Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Sep 3, 2024·0 cites·4 claims
- 0552US11605547B2Temperature measuring mechanism, temperature measuring method, and stage deviceTOKYO ELECTRON LTD·Filed 2020·Granted Mar 14, 2023·0 cites·20 claims
- 0652US11551918B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 10, 2023·0 cites·17 claims
- 0744US2022336194A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0837US2012247949A1Film forming method, resputtering method, and film forming apparatusSAKUMA TAKASHI·Filed 2012·Application pending·0 cites
- 0937US2022098717A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1033US9324600B2Mounting table structure and plasma film forming apparatusFUJISATO TOSHIAKI·Filed 2010·Granted Apr 26, 2016·0 cites·3 claims
- 1131US5148334APhase synchronization circuitHITACHI LTD·Filed 1989·Granted Sep 15, 1992·2 cites·4 claims
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