Inventor · disambiguated record
Shinji Wakui
Also filed as: WAKUI SHINJI
23 granted patents·1 pending application·1,044 citations·filing 1984–2002
97Inventor score
Top patents by PatentIndex Score
24 records- 0197US5504407AStage driving systemCANON KK·Filed 1993·Granted Apr 2, 1996·152 cites·10 claims
- 0295US6378672B1Active vibration isolation device and its control methodCANON KK·Filed 1999·Granted Apr 30, 2002·80 cites·5 claims
- 0394US6322060B1Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration methodCANON KK·Filed 1999·Granted Nov 27, 2001·81 cites·44 claims
- 0494US6170622B1Anti-vibration apparatus and anti-vibration method thereofCANON KK·Filed 1998·Granted Jan 9, 2001·83 cites·46 claims
- 0593US6286644B1Active vibration isolator, exposure apparatus, exposure method and device manufacturing methodCANON KK·Filed 2000·Granted Sep 11, 2001·60 cites·19 claims
- 0689US6473159B1Anti-vibration system in exposure apparatusCANON KK·Filed 2000·Granted Oct 29, 2002·38 cites·24 claims
- 0785US6327026B1Exposure apparatus and positioning apparatusCANON KK·Filed 1999·Granted Dec 4, 2001·54 cites·26 claims
- 0884US5900707AStage-drive control apparatus and method, and scan-projection type exposure apparatusCANON KK·Filed 1997·Granted May 4, 1999·54 cites·16 claims
- 0984US5653317AVibration removing apparatus and method thereofCANON KK·Filed 1996·Granted Aug 5, 1997·53 cites·34 claims
- 1083US5478043AControl apparatus for vertical vibration elimination tableCANON KK·Filed 1994·Granted Dec 26, 1995·44 cites·11 claims
- 1181US5013987AControl system for magnetic bearingSEIKO INSTR INC·Filed 1989·Granted May 7, 1991·40 cites·8 claims
- 1278US5511930APrecision positioning apparatusCANON KK·Filed 1993·Granted Apr 30, 1996·49 cites·6 claims
- 1377US7072777B1Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification methodCANON KK·Filed 1999·Granted Jul 4, 2006·33 cites·10 claims
- 1477US6359688B2Projection exposure apparatus and method of controlling sameCANON KK·Filed 1999·Granted Mar 19, 2002·40 cites·54 claims
- 1574US6477908B1Pedestal with vibration sensor, and exposure apparatus having the sameCANON KK·Filed 2000·Granted Nov 12, 2002·16 cites·8 claims
- 1674US6448723B1Stage system and exposure apparatusCANON KK·Filed 2000·Granted Sep 10, 2002·13 cites·6 claims
- 1773US6809300B2Temperature adjusting system in exposure apparatusCANON KK·Filed 2002·Granted Oct 26, 2004·13 cites·19 claims
- 1872US6213443B1Anti-vibration apparatus and exposure apparatus using the sameCANON KK·Filed 1999·Granted Apr 10, 2001·27 cites·21 claims
- 1970US6128552AAnti-vibration apparatus and methodCANON KK·Filed 1997·Granted Oct 3, 2000·27 cites·7 claims
- 2070US5568032APosition control systemCANON KK·Filed 1995·Granted Oct 22, 1996·41 cites·10 claims
- 2169US4650294AObjective lens apparatusSEIKO INSTR & ELECTRONICS·Filed 1984·Granted Mar 17, 1987·14 cites·18 claims
- 2262US6684132B2Active anti-vibration apparatus and exposure apparatusCANON KK·Filed 2001·Granted Jan 27, 2004·8 cites·12 claims
- 2355US5545962APositioning systemCANON KK·Filed 1994·Granted Aug 13, 1996·24 cites·22 claims
- 2436US2003057346A1Active vibration isolator and exposure apparatus with the active vibration isolator, device manufacturing methodFiled 2001·Application pending·0 cites
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