Inventor · disambiguated record
Khalil Najafi
Also filed as: NAJAFI KHALIL
52 granted patents·6 pending applications·1,811 citations·filing 1990–2023
99Inventor score
Files withUNIV MICHIGAN24UNIV MICHIGAN REGENTS24NAJAFI KHALIL5ENERTIA MICROSYSTEMS INC2GALCHEV TZENO1
Top patents by PatentIndex Score
58 records- 0198US6436853B2MicrostructuresUNIV MICHIGAN·Filed 2001·Granted Aug 20, 2002·138 cites·15 claims
- 0298US6232150B1Process for making microstructures and microstructures made therebyUNIV MICHIGAN·Filed 1998·Granted May 15, 2001·294 cites·23 claims
- 0396US6402968B1Microelectromechanical capactive accelerometer and method of making sameFiled 2000·Granted Jun 11, 2002·60 cites·5 claims
- 0495US8049326B2Environment-resistant module, micropackage and methods of manufacturing sameUNIV MICHIGAN·Filed 2008·Granted Nov 1, 2011·31 cites·27 claims
- 0595US6035714AMicroelectromechanical capacitive accelerometer and method of making sameUNIV MICHIGAN·Filed 1997·Granted Mar 14, 2000·104 cites·26 claims
- 0694US8698292B2Environment-resistant module, micropackage and methods of manufacturing sameUNIV MICHIGAN·Filed 2013·Granted Apr 15, 2014·14 cites·21 claims
- 0794US5314458ASingle channel microstimulatorUNIV MICHIGAN·Filed 1993·Granted May 24, 1994·432 cites·12 claims
- 0893US7579757B2Method and micro power generator for generating electrical power from low frequency vibrational energyUNIV MICHIGAN·Filed 2005·Granted Aug 25, 2009·38 cites·15 claims
- 0993US6938484B2Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having sameUNIV MICHIGAN·Filed 2004·Granted Sep 6, 2005·52 cites·33 claims
- 1092US9796586B2Three dimensional microstructures and fabrication processUNIV MICHIGAN REGENTS·Filed 2015·Granted Oct 24, 2017·8 cites·17 claims
- 1191US11703331B2Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devicesUNIV MICHIGAN REGENTS·Filed 2021·Granted Jul 18, 2023·4 cites·19 claims
- 1291US5059543AMethod of manufacturing thermopile infrared detectorUNIV MICHIGAN·Filed 1990·Granted Oct 22, 1991·102 cites·13 claims
- 1390US10612925B2Assembly processes for three-dimensional microstructuresUNIV MICHIGAN REGENTS·Filed 2017·Granted Apr 7, 2020·7 cites·20 claims
- 1490US9778039B2Microsystem device and methods for fabricating the sameUNIV MICHIGAN REGENTS·Filed 2012·Granted Oct 3, 2017·14 cites·31 claims
- 1589US11874112B1Vibratory gyroscopes with resonator attachmentsENERTIA MICROSYSTEMS INC·Filed 2023·Granted Jan 16, 2024·1 cites·20 claims
- 1689US10532943B2Gyroscope and fabrication processUNIV MICHIGAN REGENTS·Filed 2017·Granted Jan 14, 2020·9 cites·15 claims
- 1789US7098117B2Method of fabricating a package with substantially vertical feedthroughs for micromachined or MEMS devicesUNIV MICHIGAN·Filed 2003·Granted Aug 29, 2006·61 cites·39 claims
- 1888US8476737B2Environment-resistant module, micropackage and methods of manufacturing sameNAJAFI KHALIL·Filed 2011·Granted Jul 2, 2013·8 cites·11 claims
- 1988US7008193B2Micropump assembly for a microgas chromatograph and the likeUNIV MICHIGAN·Filed 2003·Granted Mar 7, 2006·48 cites·23 claims
- 2088US6286369B1Single-side microelectromechanical capacitive acclerometer and method of making sameUNIV MICHIGAN·Filed 2000·Granted Sep 11, 2001·30 cites·14 claims
- 2187US5100479AThermopile infrared detector with semiconductor supporting rimUNIV MICHIGAN·Filed 1991·Granted Mar 31, 1992·72 cites·13 claims
- 2286US6167757B1Single-side microelectromechanical capacitive accelerometer and method of making sameUNIV MICHIGAN·Filed 1999·Granted Jan 2, 2001·50 cites·12 claims
- 2385US6942750B2Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabricationUNIV MICHIGAN·Filed 2002·Granted Sep 13, 2005·44 cites·18 claims
- 2484US7029829B2Low temperature method for forming a microcavity on a substrate and article having sameUNIV MICHIGAN·Filed 2003·Granted Apr 18, 2006·36 cites·20 claims
- 2580US10263173B2Multi-axis piezoelectric transducerUNIV MICHIGAN REGENTS·Filed 2016·Granted Apr 16, 2019·2 cites·33 claims
- 2679US9874459B2Actuation and sensing platform for sensor calibration and vibration isolationUNIV MICHIGAN REGENTS·Filed 2016·Granted Jan 23, 2018·4 cites·21 claims
- 2779US9494425B2Gyroscope and method of fabricating a resonator for a gyroscopeNAJAFI KHALIL·Filed 2012·Granted Nov 15, 2016·7 cites·17 claims
- 2878US10734877B2Electromagnetic energy transducerUNIV MICHIGAN REGENTS·Filed 2014·Granted Aug 4, 2020·5 cites·21 claims
- 2978US6718605B2Single-side microelectromechanical capacitive accelerometer and method of making sameUNIV MICHIGAN·Filed 2001·Granted Apr 13, 2004·20 cites·9 claims
- 3077US12313406B2Vibratory gyroscopes with resonator attachmentsENERTIA MICROSYSTEMS INC·Filed 2023·Granted May 27, 2025·0 cites·20 claims
- 3176US10730748B2Three dimensional microstructures and fabrication processUNIV MICHIGAN REGENTS·Filed 2017·Granted Aug 4, 2020·1 cites·20 claims
- 3276US10495663B2High aspect-ratio low noise multi-axis accelerometersUNIV MICHIGAN REGENTS·Filed 2017·Granted Dec 3, 2019·2 cites·19 claims
- 3375US11548805B2Gyroscope and fabrication processUNIV MICHIGAN REGENTS·Filed 2019·Granted Jan 10, 2023·0 cites·19 claims
- 3475US9265465B2Probes having deployable sites and methods for making the sameNAJAFI KHALIL·Filed 2012·Granted Feb 23, 2016·13 cites·20 claims
- 3575US8796907B2Increased frequency power generation using low-frequency ambient vibrationsGALCHEV TZENO·Filed 2010·Granted Aug 5, 2014·7 cites·18 claims
- 3675US6884732B2Method of fabricating a device having a desired non-planar surface or profile and device produced therebyUNIV MICHIGAN·Filed 2002·Granted Apr 26, 2005·24 cites·20 claims
- 3773US10250235B2Full-wave charge pump with low-voltage startupUNIV MICHIGAN REGENTS·Filed 2016·Granted Apr 2, 2019·3 cites·18 claims
- 3873US6958531B2Multi-substrate package and method for assembling sameUNIV MICHIGAN·Filed 2003·Granted Oct 25, 2005·19 cites·22 claims
- 3972US9400197B2Fluid flow sensorUNIV MICHIGAN REGENTS·Filed 2012·Granted Jul 26, 2016·4 cites·26 claims
- 4072US8209857B2Method of making a thin film deviceNAJAFI KHALIL·Filed 2010·Granted Jul 3, 2012·4 cites·17 claims
- 4171US7881409B2Demodulator, chip and method for digitally demodulating an FSK signalUNIV MICHIGAN·Filed 2005·Granted Feb 1, 2011·5 cites·20 claims
- 4271US6939778B2Method of joining an insulator element to a substrateUNIV MICHIGAN·Filed 2003·Granted Sep 6, 2005·21 cites·14 claims
- 4371US2024019249A1Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other DevicesUNIV MICHIGAN REGENTS·Filed 2023·Application pending·0 cites
- 4468US9502995B2Micro-hydraulic deviceUNIV MICHIGAN REGENTS·Filed 2013·Granted Nov 22, 2016·2 cites·24 claims
- 4567US10266392B2Environment-resistant module, micropackage and methods of manufacturing sameUNIV MICHIGAN REGENTS·Filed 2014·Granted Apr 23, 2019·2 cites·21 claims
- 4664US11678578B2Thermoelectric micro-module with high leg density for energy harvesting and cooling applicationsUNIV MICHIGAN REGENTS·Filed 2021·Granted Jun 13, 2023·0 cites·21 claims
- 4761US10985633B2Vibrational energy harvester with amplifier having gear assemblyUNIV MICHIGAN REGENTS·Filed 2014·Granted Apr 20, 2021·1 cites·16 claims
- 4859US6962831B2Method of making a thick microstructural oxide layerUNIV MICHIGAN·Filed 2003·Granted Nov 8, 2005·8 cites·16 claims
- 4947US11027479B2Thermal control mold for making three-dimensional microstructuresUNIV MICHIGAN REGENTS·Filed 2017·Granted Jun 8, 2021·0 cites·20 claims
- 5046US2019058103A1Thermoelectric micro-module with high leg density for energy harvesting and cooling applicationsUNIV MICHIGAN REGENTS·Filed 2017·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
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