Inventor · disambiguated record
Linh X. Can
Also filed as: CAN LINH · CAN LINH X · CAN LINH XUONG
9 granted patents·2 pending applications·170 citations·filing 1997–2013
89Inventor score
Files withAPLEX INC3MOSEL VITELIC INC3JIFU MACHINERY & EQUIPMENT INC1LAW KAM S1NOVELLUS SYSTEMS INC1
Top patents by PatentIndex Score
11 records- 0180US6267655B1Retaining ring for wafer polishingMOSEL VITELIC INC·Filed 1998·Granted Jul 31, 2001·53 cites·18 claims
- 0277US8617349B2Showerhead assembly for plasma processing chamberLAW KAM S·Filed 2010·Granted Dec 31, 2013·6 cites·29 claims
- 0375US6315857B1Polishing pad shaping and patterningMOSEL VITELIC INC·Filed 1998·Granted Nov 13, 2001·42 cites·9 claims
- 0471US8998552B2Processing apparatus and processing methodTOSHIMA MASATO·Filed 2009·Granted Apr 7, 2015·5 cites·26 claims
- 0568US6042457AConditioner assembly for a chemical mechanical polishing apparatusAPLEX INC·Filed 1998·Granted Mar 28, 2000·28 cites·27 claims
- 0662US5957764AModular wafer polishing apparatus and methodAPLEX INC·Filed 1997·Granted Sep 28, 1999·25 cites·23 claims
- 0759US6860710B1Lifting mechanism for integrated circuit fabrication systemsNOVELLUS SYSTEMS INC·Filed 2003·Granted Mar 1, 2005·7 cites·7 claims
- 0843US6322429B1Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatusMOSEL VITELIC INC·Filed 2000·Granted Nov 27, 2001·2 cites·10 claims
- 0941US2015079719A1Systems and methods for flipping semiconductor bodies during a manufacturing processJIFU MACHINERY & EQUIPMENT INC·Filed 2013·Application pending·0 cites
- 1037US2012210936A1Systems and methods for mutli-chamber photovoltaic module processingWONG JERRY Y·Filed 2012·Application pending·0 cites
- 1124US6062961AWafer polishing head driveAPLEX INC·Filed 1997·Granted May 16, 2000·2 cites·10 claims
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