Inventor · disambiguated record
Anastasius Jacobus Anicetus Bruinsma
Also filed as: BRUINSMA ANASTASIUS J A · BRUINSMA ANASTASIUS JACOBUS AN · BRUINSMA ANASTASIUS JACOBUS ANICETUS
15 granted patents·1 pending application·153 citations·filing 1993–2009
92Inventor score
Files withASML NETHERLANDS BV13BRUINSMA ANASTASIUS JACOBUS ANICETUS1BUSSINK PETER GERHARDUS WILHELMUS1NL SPOORWEGEN NV1
Top patents by PatentIndex Score
16 records- 0191US7116401B2Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 3, 2006·49 cites·30 claims
- 0286US7233384B2Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensorASML NETHERLANDS BV·Filed 2005·Granted Jun 19, 2007·10 cites·20 claims
- 0386US7173270B1Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same.ASML NETHERLANDS BV·Filed 2005·Granted Feb 6, 2007·15 cites·26 claims
- 0473US5462244ASystem for detecting trainsNL SPOORWEGEN NV·Filed 1993·Granted Oct 31, 1995·48 cites·19 claims
- 0569US7480028B2Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer programASML NETHERLANDS BV·Filed 2005·Granted Jan 20, 2009·3 cites·26 claims
- 0665US7781237B2Alignment marker and lithographic apparatus and device manufacturing method using the sameASML NETHERLANDS BV·Filed 2005·Granted Aug 24, 2010·2 cites·25 claims
- 0762US6955074B2Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Oct 18, 2005·7 cites·27 claims
- 0856US7342644B2Methods and systems for lithographic beam generationASML NETHERLANDS BV·Filed 2004·Granted Mar 11, 2008·4 cites·19 claims
- 0956US7148494B2Level sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 12, 2006·7 cites·17 claims
- 1054US7079225B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 18, 2006·4 cites·17 claims
- 1146US7177009B2Position determination method and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Feb 13, 2007·1 cites·25 claims
- 1242US7391676B2Ultrasonic distance sensorsASML NETHERLANDS BV·Filed 2004·Granted Jun 24, 2008·3 cites·21 claims
- 1340US8514368B2Lithographic apparatus, method for levelling an object, and lithographic projection methodBUSSINK PETER GERHARDUS WILHELMUS·Filed 2008·Granted Aug 20, 2013·0 cites·22 claims
- 1439US8547551B2Lithographic apparatus and contamination detection methodBRUINSMA ANASTASIUS JACOBUS ANICETUS·Filed 2009·Granted Oct 1, 2013·0 cites·15 claims
- 1538US2005275841A1Alignment marker and lithographic apparatus and device manufacturing method using the sameASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1635US7280228B2System and method of measurement, system and method of alignment, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Oct 9, 2007·0 cites·26 claims
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