Inventor · disambiguated record
Subramanian Balakumar
Also filed as: BALAKUMAR SUBRAMANIAN
7 granted patents·96 citations·filing 2000–2004
86Inventor score
Files withCHARTERED SEMICONDUCTOR MFG7
Top patents by PatentIndex Score
7 records- 0183US6830971B2High K artificial lattices for capacitor applications to use in CU or AL BEOLCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Dec 14, 2004·26 cites·40 claims
- 0283US6248006B1CMP uniformityCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Jun 19, 2001·27 cites·7 claims
- 0373US6663472B2Multiple step CMP polishingCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Dec 16, 2003·16 cites·12 claims
- 0460US6649486B1Method to form shallow trench isolationsCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Nov 18, 2003·11 cites·15 claims
- 0558US6569770B2Method for improving oxide erosion of tungsten CMP operationsCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted May 27, 2003·8 cites·21 claims
- 0655US7095073B2High K artificial lattices for capacitor applications to use in Cu or Al BEOLCHARTERED SEMICONDUCTOR MFG·Filed 2004·Granted Aug 22, 2006·4 cites·8 claims
- 0747US6726545B2Linear polishing for improving substrate uniformityCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Apr 27, 2004·4 cites·25 claims
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