Inventor · disambiguated record
Tomonori Esaki
Also filed as: ESAKI TOMONORI
2 granted patents·2 pending applications·0 citations·filing 2015–2022
22Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0150US12281390B2Substrate liquid processing apparatus for supplying temperature-controlled plating liquidTOKYO ELECTRON LTD·Filed 2019·Granted Apr 22, 2025·0 cites·8 claims
- 0235US2024079269A1Plating method and plating apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0334US9748100B2Substrate processing method, storage medium and substrate processing systemTOKYO ELECTRON LTD·Filed 2015·Granted Aug 29, 2017·0 cites·7 claims
- 0433US2017032983A1Substrate processing apparatus, substrate processing method, maintenance method of substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →