Inventor · disambiguated record

Guangyu Xia

Also filed as: XIA GUANGYU

1 granted patent·1 pending application·0 citations·filing 2020–2025

13Inventor score

Technology areasH10P

Files withACM RESEARCH SHANGHAI INC2

Top patents by PatentIndex Score

2 records

0172US2025285882A1Method and apparatus for removing particles or photoresist on substratesACM RESEARCH SHANGHAI INC·Filed 2025·Application pending·0 cites
0257US12334367B2Method and apparatus for removing particles or photoresist on substratesACM RESEARCH SHANGHAI INC·Filed 2020·Granted Jun 17, 2025·0 cites·32 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →