Inventor · disambiguated record
Izumi Oya
Also filed as: OYA IZUMI
6 granted patents·1 pending application·114 citations·filing 2000–2003
85Inventor score
Top patents by PatentIndex Score
7 records- 0189US6616773B1Substrate treatment methodMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Sep 9, 2003·47 cites·12 claims
- 0284US6517998B1Method for removing photoresist film and apparatus used thereforMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Feb 11, 2003·21 cites·4 claims
- 0373US6715944B2Apparatus for removing photoresist filmMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Apr 6, 2004·16 cites·6 claims
- 0472US6517999B1Method of removing photoresist filmSHIMADA RIKA KOUGYO KABUSHIKI·Filed 2000·Granted Feb 11, 2003·20 cites·9 claims
- 0560US6955178B1Substrate treatment apparatusMITSUBISHI ELECTRIC CORP·Filed 2003·Granted Oct 18, 2005·6 cites·8 claims
- 0658US7965372B2Apparatus for removing photoresist filmMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Jun 21, 2011·4 cites·15 claims
- 0734US2003066549A1Substrate processing method, and apparatus thereforFiled 2001·Application pending·0 cites
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