Inventor
LINDLEY ROGER
US4 patents
Patents
4 patentsUS6113731ASep 5, 2000
Magnetically-enhanced plasma chamber with non-uniform magnetic field
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US12560916B2Feb 24, 2026
Adjusting chamber performance by equipment constant updates
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US12504726B2Dec 23, 2025
Determining equipment constant updates by machine learning
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US12498705B2Dec 16, 2025
Chamber matching by equipment constant updates
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