Inventor · disambiguated record
Sang Kee Lee
Also filed as: LEE SANG KEE
12 granted patents·7 pending applications·5 citations·filing 2012–2022
82Inventor score
Top patents by PatentIndex Score
19 records- 0187US11011405B2Apparatus for supporting substrate having gas supply hole and method of manufacturing sameSEMES CO LTD·Filed 2019·Granted May 18, 2021·4 cites·13 claims
- 0268US8853032B2Semiconductor device and method for manufacturing the sameSK HYNIX INC·Filed 2012·Granted Oct 7, 2014·1 cites·8 claims
- 0364US2022406577A1Substrate supporting member and substrate processing apparatus including sameSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0459US12438028B2Substrate support unit, method of manufacturing the same, and substrate processing apparatus including the sameSEMES CO LTD·Filed 2022·Granted Oct 7, 2025·0 cites·13 claims
- 0559US9252216B2Semiconductor device and method for manufacturing the sameSK HYNIX INC·Filed 2014·Granted Feb 2, 2016·0 cites·11 claims
- 0657US9704989B2Semiconductor device and method for manufacturing the sameSK HYNIX INC·Filed 2016·Granted Jul 11, 2017·0 cites·4 claims
- 0756US9406766B2Semiconductor device and method for manufacturing the sameSK HYNIX INC·Filed 2015·Granted Aug 2, 2016·0 cites·5 claims
- 0855US11705357B2Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuckSEMES CO LTD·Filed 2020·Granted Jul 18, 2023·0 cites·18 claims
- 0953US2023207288A1Substrate treatment apparatusSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1051US11367646B2Electrostatic chuck and electrostatic chuck apparatus including the sameSEMES CO LTD·Filed 2020·Granted Jun 21, 2022·0 cites·10 claims
- 1151US2022076929A1Substrate treating apparatus and cover ring thereofSEMES CO LTD·Filed 2021·Application pending·0 cites
- 1251US2019115194A1Substrate supporting member and substrate processing apparatus including sameSEMES CO LTD·Filed 2018·Application pending·0 cites
- 1349US12354852B2Electrostatic chuck, substrate processing apparatus, and substrate processing methodSEMES CO LTD·Filed 2021·Granted Jul 8, 2025·0 cites·17 claims
- 1445US11056367B2Buffer unit, and apparatus for treating substrate with the unitSEMES CO LTD·Filed 2019·Granted Jul 6, 2021·0 cites·20 claims
- 1544US11056320B2Substrate treating apparatus, substrate support unit, and substrate treating methodSEMES CO LTD·Filed 2019·Granted Jul 6, 2021·0 cites·15 claims
- 1643US2021366696A1Electrostatic chuck, method of manufacturing electrostatic chuck, and substrate processing apparatusSEMES CO LTD·Filed 2021·Application pending·0 cites
- 1741US2021027995A1Focus ring and substrate treating apparatus comprising the sameSEMES CO LTD·Filed 2020·Application pending·0 cites
- 1840US11244847B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Granted Feb 8, 2022·0 cites·7 claims
- 1937US2021020488A1Wafer support unit and wafer treatment system including the sameSEMES CO LTD·Filed 2020·Application pending·0 cites
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