Inventor · disambiguated record
Tzung-Chi Fu
Also filed as: FU TZUNG-CHI
68 granted patents·3 pending applications·255 citations·filing 2001–2024
98Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD58TAIWAN SEMICONDUCTOR MFG9PENG JUI-CHUNG2HSIEH CHANG-TSUN1HSU CHIA-HAO1
Top patents by PatentIndex Score
71 records- 0197US10429729B2EUV radiation modification methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 1, 2019·7 cites·20 claims
- 0297US10314154B1System and method for extreme ultraviolet source controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 4, 2019·13 cites·20 claims
- 0397US8765582B2Method for extreme ultraviolet electrostatic chuck with reduced clamp effectHSU CHIA-HAO·Filed 2012·Granted Jul 1, 2014·93 cites·20 claims
- 0496US12124178B2Lithography system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 22, 2024·2 cites·20 claims
- 0596US10524345B2Residual gain monitoring and reduction for EUV drive laserTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 31, 2019·9 cites·20 claims
- 0695US11984314B2Particle removal methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 14, 2024·3 cites·20 claims
- 0795US11675280B2Lithography system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 13, 2023·2 cites·20 claims
- 0894US11698591B2System and method of discharging an EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 11, 2023·2 cites·20 claims
- 0994US11687011B2Reticle carrier and associated methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 27, 2023·2 cites·20 claims
- 1093US11419203B2EUV radiation modification methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 16, 2022·2 cites·20 claims
- 1193US10917959B2EUV radiation modification methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 9, 2021·3 cites·20 claims
- 1292US8199314B2System and method for improving immersion scanner overlay performancePENG JUI-CHUNG·Filed 2011·Granted Jun 12, 2012·12 cites·20 claims
- 1391US11832372B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 28, 2023·1 cites·20 claims
- 1491US11681235B2System and method for cleaning an EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 20, 2023·3 cites·20 claims
- 1591US10718718B2EUV vessel inspection method and related systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 21, 2020·4 cites·20 claims
- 1690US10880981B2Collector pellicleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·4 cites·20 claims
- 1789US10980100B2Residual gain monitoring and reduction for EUV drive laserTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 13, 2021·2 cites·20 claims
- 1887US10429314B2EUV vessel inspection method and related systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 1, 2019·3 cites·20 claims
- 1986US12099310B2System and method for cleaning an EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 24, 2024·1 cites·20 claims
- 2085US11982944B2Method of lithography process and transferring a reticleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 14, 2024·0 cites·20 claims
- 2185US11062898B2Particle removal apparatus, particle removal system and particle removal methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 13, 2021·3 cites·20 claims
- 2283US10955762B2Radiation source apparatus and method for decreasing debris in radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 23, 2021·1 cites·20 claims
- 2382US12167525B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 2482US10712676B2Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 14, 2020·1 cites·20 claims
- 2582US10495987B2Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 3, 2019·1 cites·20 claims
- 2682US6425497B1Method and apparatus for dispensing resist solutionTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jul 30, 2002·49 cites·18 claims
- 2781US12354867B2Particle removal apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jul 8, 2025·0 cites·20 claims
- 2881US12189311B2Reticle carrier and associated methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 2980US12235594B2Method for performing lithography process, light source, and EUV lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 3080US11703763B2Method of lithography process using reticle container with discharging deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 18, 2023·0 cites·20 claims
- 3180US10842009B2System and method for extreme ultraviolet source controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 3280US10477663B2Light source for lithography exposure processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 12, 2019·1 cites·20 claims
- 3380US2025093789A1Reticle carrier and associated methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3479US11723141B2EUV radiation generation methods and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 8, 2023·0 cites·20 claims
- 3579US8068208B2System and method for improving immersion scanner overlay performancePENG JUI-CHUNG·Filed 2007·Granted Nov 29, 2011·5 cites·17 claims
- 3678US12347997B2Methods and systems for aligning master oscillator power amplifier systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jul 1, 2025·0 cites·20 claims
- 3778US10631392B2EUV collector contamination preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 21, 2020·1 cites·20 claims
- 3876US11703769B2Light source, EUV lithography system, and method for performing circuit layout patterning processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 18, 2023·0 cites·20 claims
- 3976US11531278B2EUV lithography system and method for decreasing debris in EUV lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 4076US10146141B2Lithography process and system with enhanced overlay qualityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 4, 2018·2 cites·20 claims
- 4175US11483918B2Light source for lithography exposure processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Oct 25, 2022·0 cites·20 claims
- 4275US11320733B2Reticle with conductive material structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 3, 2022·0 cites·20 claims
- 4375US11272606B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Mar 8, 2022·1 cites·18 claims
- 4474US11973302B2Methods and systems for aligning master oscillator power amplifier systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 30, 2024·0 cites·20 claims
- 4573US11106146B2Lithography system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 31, 2021·0 cites·20 claims
- 4672US11737200B2Residual gain monitoring and reduction for EUV drive laserTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 22, 2023·0 cites·20 claims
- 4771US11333983B2Light source, EUV lithography system, and method for generating EUV radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 17, 2022·0 cites·20 claims
- 4871US11224115B2System and method for extreme ultraviolet source controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jan 11, 2022·0 cites·20 claims
- 4971US2024377766A1System and method for cleaning an euv maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 5070US11092555B2EUV vessel inspection method and related systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 17, 2021·0 cites·20 claims
Showing the top 50 of 71 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →