Inventor · disambiguated record
Shou Takami
Also filed as: TAKAMI SHOU
4 granted patents·65 citations·filing 1999–2014
74Inventor score
Top patents by PatentIndex Score
4 records- 0188US6872944B2Scanning electron microscopeHITACHI LTD·Filed 2003·Granted Mar 29, 2005·24 cites·6 claims
- 0284US6667476B2Scanning electron microscopeHITACHI LTD·Filed 1999·Granted Dec 23, 2003·40 cites·30 claims
- 0360US10101150B2Height measurement device and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 16, 2018·1 cites·11 claims
- 0445US10393509B2Pattern height measurement device and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Aug 27, 2019·0 cites·13 claims
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