Inventor · disambiguated record
Bernardus Antonius Johannes Luttikhuis
Also filed as: LUTTIKHUIS BERNARDUS A J · LUTTIKHUIS BERNARDUS ANTONIUS · LUTTIKHUIS BERNARDUS ANTONIUS JOHANNES
26 granted patents·2 pending applications·451 citations·filing 2000–2022
95Inventor score
Files withASML NETHERLANDS BV21LOOPSTRA ERIK ROELOF2ASML NETHERLAND BV1AUER-JONGEPIER SUZAN L1JACOBS HERNES1
Top patents by PatentIndex Score
28 records- 0198US7483120B2Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·121 cites·23 claims
- 0298US7253875B1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 7, 2007·166 cites·21 claims
- 0394US6542220B1Purge gas systems for use in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Apr 1, 2003·92 cites·15 claims
- 0490US7724351B2Lithographic apparatus, device manufacturing method and exchangeable optical elementASML NETHERLANDS BV·Filed 2006·Granted May 25, 2010·12 cites·34 claims
- 0587US10209634B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 19, 2019·3 cites·20 claims
- 0684US9513566B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Dec 6, 2016·6 cites·19 claims
- 0784US7538857B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerASML NETHERLANDS BV·Filed 2005·Granted May 26, 2009·7 cites·16 claims
- 0871US7522258B2Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contaminationASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·3 cites·35 claims
- 0970US7656506B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·2 cites·16 claims
- 1069US7545478B2Lithographic apparatus, thermal conditioning system, and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2004·Granted Jun 9, 2009·12 cites·36 claims
- 1168US7576835B2Substrate handler, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 18, 2009·2 cites·19 claims
- 1267US6977713B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Dec 20, 2005·9 cites·25 claims
- 1360US7352438B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 1, 2008·1 cites·19 claims
- 1458US8636458B2Integrated post-exposure bake trackAUER-JONGEPIER SUZAN L·Filed 2007·Granted Jan 28, 2014·2 cites·21 claims
- 1557US8411252B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerJACOBS HERNES·Filed 2009·Granted Apr 2, 2013·0 cites·5 claims
- 1657US8289498B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 16, 2012·1 cites·8 claims
- 1757US2024411233A1Lithographic apparatus and associated methodsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1856US7804584B2Integrated circuit manufacturing methods with patterning device position determinationASML NETHERLAND BV·Filed 2008·Granted Sep 28, 2010·0 cites·20 claims
- 1955US7471373B2Lithographic apparatus with patterning device position determinationASML NETHERLANDS BV·Filed 2004·Granted Dec 30, 2008·3 cites·23 claims
- 2055US7126664B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·4 cites·29 claims
- 2153US7130019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 31, 2006·3 cites·27 claims
- 2250US8174680B2Substrate handler, lithographic apparatus and device manufacturing methodVAN DER SCHOOT HARMEN KLAAS·Filed 2009·Granted May 8, 2012·0 cites·21 claims
- 2345US7375795B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted May 20, 2008·1 cites·33 claims
- 2444US7061579B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jun 13, 2006·1 cites·23 claims
- 2543US8264670B2Lithographic apparatus and device manufacturing method for clamping a patterning deviceLOOPSTRA ERIK ROELOF·Filed 2006·Granted Sep 11, 2012·0 cites·31 claims
- 2642US7961291B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 14, 2011·0 cites·22 claims
- 2741US7256867B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·0 cites·56 claims
- 2833US2014340663A1Apparatus for Monitoring a Lithographic Patterning DeviceSCACCABAROZZI LUIGI·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →