Inventor · disambiguated record
Akira Karakama
Also filed as: KARAKAMA AKIRA
3 granted patents·17 citations·filing 2006–2015
63Inventor score
Technology areasH01J
Top patents by PatentIndex Score
3 records- 0178US8168950B2Charged particle beam apparatus, and image generation method with charged particle beam apparatusFURUHASHI KANJI·Filed 2008·Granted May 1, 2012·10 cites·10 claims
- 0275US7916926B2Semiconductor inspection apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 29, 2011·7 cites·4 claims
- 0337US10636620B2Charged particle beam device and control method of charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Apr 28, 2020·0 cites·12 claims
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