Inventor · disambiguated record
Sang-Yoon Woo
Also filed as: WOO SANG-YOON
5 granted patents·72 citations·filing 2008–2016
78Inventor score
Top patents by PatentIndex Score
5 records- 0197US9772555B2Methods of forming patterns using photoresistsSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Sep 26, 2017·52 cites·18 claims
- 0288US10134606B2Method of forming patterns and method of manufacturing integrated circuit device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Nov 20, 2018·9 cites·37 claims
- 0382US8815697B2Method of fabricating semiconductor deviceYOON JUN-HO·Filed 2012·Granted Aug 26, 2014·9 cites·19 claims
- 0460US10353290B2Photoresist composition for extreme ultraviolet and method of forming photoresist pattern using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jul 16, 2019·1 cites·12 claims
- 0556US8125617B2Apparatus and method for manufacturing semiconductor deviceWOO SANG-YOON·Filed 2008·Granted Feb 28, 2012·1 cites·14 claims
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