Inventor · disambiguated record
David Lou
Also filed as: LOU DAVID · LOU DAVID YUAN KONG
4 granted patents·2 pending applications·123 citations·filing 1975–2019
74Inventor score
Top patents by PatentIndex Score
6 records- 0195US4074282ARadiation-sensitive record with protected sensitive surfacePHILIPS CORP·Filed 1976·Granted Feb 14, 1978·86 cites·19 claims
- 0279US3975252AHigh-resolution sputter etchingBELL TELEPHONE LABOR INC·Filed 1975·Granted Aug 17, 1976·37 cites·20 claims
- 0349US11345852B2Etchant compositionLAM RES AG·Filed 2019·Granted May 31, 2022·0 cites·13 claims
- 0449US2009211596A1Method of post etch polymer residue removalLAM RES CORP·Filed 2007·Application pending·0 cites
- 0543US2012115332A1Method of Post Etch Polymer Residue RemovalYUN SEOKMIN·Filed 2012·Application pending·0 cites
- 0633US10483010B2Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environmentLAM RES AG·Filed 2016·Granted Nov 19, 2019·0 cites·19 claims
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