Inventor · disambiguated record
Harumi Hayakawa
Also filed as: HAYAKAWA HARUMI
4 granted patents·2 pending applications·12 citations·filing 2011–2024
67Inventor score
Top patents by PatentIndex Score
6 records- 0185US8999631B2Primer and pattern forming method for layer including block copolymerSENZAKI TAKAHIRO·Filed 2011·Granted Apr 7, 2015·7 cites·6 claims
- 0280US9134617B2Solvent developable negative resist composition, resist pattern formation method, and method for forming pattern of layer including block copolymerSENZAKI TAKAHIRO·Filed 2012·Granted Sep 15, 2015·4 cites·18 claims
- 0358US9060415B2Method for producing substrate having surface nanostructureFUJIKAWA SHIGENORI·Filed 2012·Granted Jun 16, 2015·1 cites·20 claims
- 0458US2025044699A1Film deposition method, method for manufacturing device, and film deposition apparatusRIKEN·Filed 2024·Application pending·0 cites
- 0543US8961802B2Method of forming fine pattern, and developerRIKEN·Filed 2013·Granted Feb 24, 2015·0 cites·16 claims
- 0637US2014127626A1Resist composition for negative development which is used for formation of guide pattern, guide pattern formation method, and method for forming pattern on layer containing block copolymerSENZAKI TAKAHIRO·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →