Inventor · disambiguated record

Hidefumi Ishikawa

Also filed as: ISHIKAWA HIDEFUMI

1 granted patent·2 citations·filing 2014–2014

18Inventor score

Technology areasG03F

Files withJSR CORP1

Top patents by PatentIndex Score

1 record

0167US9417522B2Photosensitive resin composition and method for producing resist patternJSR CORP·Filed 2014·Granted Aug 16, 2016·2 cites·13 claims

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