Inventor · disambiguated record

Axel Sebastiaan Lexmond

Also filed as: LEXMOND AXEL SEBASTIAAN

4 granted patents·6 citations·filing 2009–2013

61Inventor score

Technology areasB01J C23C G02B G03F

Files withLEXMOND AXEL SEBASTIAAN1 MAAS DIEDERIK JAN1 SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS1 TNO1

Top patents by PatentIndex Score

4 records

0172US8982316B2Lithographic apparatus, a metrology apparatus and a method of using the apparatusLEXMOND AXEL SEBASTIAAN·Filed 2009·Granted Mar 17, 2015·5 cites·20 claims
0251US11549180B2Apparatus and method for atomic layer depositionMAAS DIEDERIK JAN·Filed 2009·Granted Jan 10, 2023·0 cites·20 claims
0344US10441938B2Fluid flow continuous physical or chemical processes using dean vorticesTNO·Filed 2013·Granted Oct 15, 2019·0 cites·23 claims
0443US9176398B2Method and system for thermally conditioning an optical elementSCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS·Filed 2009·Granted Nov 3, 2015·1 cites·13 claims

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