Inventor · disambiguated record
Michael J. Churley
Also filed as: CHURLEY MICHAEL J
4 granted patents·237 citations·filing 1991–1993
82Inventor score
Technology areasC23C
Files withMATERIALS RESEARCH CORP4
Top patents by PatentIndex Score
4 records- 0187US5308655AProcessing for forming low resistivity titanium nitride filmsMATERIALS RESEARCH CORP·Filed 1992·Granted May 3, 1994·76 cites·4 claims
- 0285US5271963AElimination of low temperature ammonia salt in TiCl4 NH3 CVD reactionMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 21, 1993·59 cites·6 claims
- 0382US5348587AApparatus for elimination of low temperature ammonia salts in TiCl4 NH3 CVD reactionMATERIALS RESEARCH CORP·Filed 1993·Granted Sep 20, 1994·49 cites·8 claims
- 0481US5279857AProcess for forming low resistivity titanium nitride filmsMATERIALS RESEARCH CORP·Filed 1991·Granted Jan 18, 1994·53 cites·10 claims
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