Inventor · disambiguated record
Masato Hamatani
Also filed as: HAMATANI MASATO
12 granted patents·4 pending applications·454 citations·filing 1994–2018
93Inventor score
Top patents by PatentIndex Score
16 records- 0194US5534970AScanning exposure apparatusNIKON CORP·Filed 1994·Granted Jul 9, 1996·200 cites·18 claims
- 0288US7215408B2Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer systemNIKON CORP·Filed 2005·Granted May 8, 2007·13 cites·33 claims
- 0388US6961115B2Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer systemNIKON CORP·Filed 2002·Granted Nov 1, 2005·45 cites·54 claims
- 0482USRE37309EScanning exposure apparatusNIPPON KOGAKU KK·Filed 1998·Granted Aug 7, 2001·57 cites·60 claims
- 0580US6222610B1Exposure apparatusNIKON CORP·Filed 1998·Granted Apr 24, 2001·36 cites·24 claims
- 0675US6686989B2Exposure apparatusNIKON CORP·Filed 2002·Granted Feb 3, 2004·11 cites·28 claims
- 0774US5425045AShort wavelength laser optical apparatusNIKON CORP·Filed 1994·Granted Jun 13, 1995·27 cites·19 claims
- 0872US6128030ASemiconductor exposure deviceSONY CORP·Filed 1998·Granted Oct 3, 2000·26 cites·53 claims
- 0972US5760408ASemiconductor exposure deviceSONY CORP·Filed 1996·Granted Jun 2, 1998·28 cites·11 claims
- 1069US6215808B1Laser apparatus, exposure apparatus, lithography system, method for producing circuit elements, gas supply system and gas supply methodNIKON CORP·Filed 2000·Granted Apr 10, 2001·11 cites·57 claims
- 1144US2019008367A1Endoscope apparatus, endoscope system and surgical system including the sameNIKON CORP·Filed 2018·Application pending·0 cites
- 1242US8780326B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2006·Granted Jul 15, 2014·0 cites·20 claims
- 1342US2009226846A1Exposure Apparatus, Exposure Method, and Device Manufacturing MethodNIKON CORP·Filed 2006·Application pending·0 cites
- 1441US2006285100A1Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 1540US2001019400A1Exposure apparatusNIKON CORP·Filed 2001·Application pending·0 cites
- 1630US8920569B2Pollutant removal method and apparatus, and exposure method and apparatusWATANABE SHUNJI·Filed 2005·Granted Dec 30, 2014·0 cites·31 claims
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