Inventor · disambiguated record
Motoko Nakagomi
Also filed as: NAKAGOMI MOTOKO
4 granted patents·2 pending applications·3 citations·filing 2014–2019
58Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0172US9390933B2Etching method, storage medium and etching apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 12, 2016·3 cites·11 claims
- 0243US10968514B2Substrate mounting tableTOKYO ELECTRON LTD·Filed 2018·Granted Apr 6, 2021·0 cites·5 claims
- 0341US2019371572A1Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0441US2019385843A1Method of forming metal film and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0540US10319585B2Film forming methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·0 cites·5 claims
- 0636US10504743B2Method of etching filmTOKYO ELECTRON LTD·Filed 2018·Granted Dec 10, 2019·0 cites·7 claims
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