Inventor · disambiguated record
Yukio Ohizumi
Also filed as: OHIZUMI YUKIO
7 granted patents·1 pending application·67 citations·filing 2004–2018
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0196US10221480B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2016·Granted Mar 5, 2019·19 cites·5 claims
- 0292US8034723B2Film deposition apparatus and film deposition methodTOKYO ELECTRON LTD·Filed 2010·Granted Oct 11, 2011·19 cites·11 claims
- 0388US8845857B2Substrate processing apparatusOHIZUMI YUKIO·Filed 2010·Granted Sep 30, 2014·17 cites·8 claims
- 0467US10584416B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 10, 2020·1 cites·9 claims
- 0562US7674336B2Processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Mar 9, 2010·11 cites·5 claims
- 0642US11572625B2Rotation detection jig, substrate processing apparatus and method of operating the substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Feb 7, 2023·0 cites·7 claims
- 0740US11674225B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 13, 2023·0 cites·6 claims
- 0837US2013047924A1Substrate processing apparatus and film deposition apparatusENOMOTO TADASHI·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →