Inventor · disambiguated record
Jyunji Ariga
Also filed as: ARIGA JYUNJI
1 granted patent·1 pending application·2 citations·filing 2011–2020
19Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0182US11260433B2Cleaning method of substrate processing apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Mar 1, 2022·2 cites·7 claims
- 0234US2011287629A1Silicon film formation method and silicon film formation apparatusKAKIMOTO AKINOBU·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →