Inventor · disambiguated record
Petrus Johannes Maria Broodbakker
Also filed as: BROODBAKKER PETRUS JOHANNES MA · BROODBAKKER PETRUS JOHANNES MARIA
3 granted patents·282 citations·filing 2003–2007
77Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0195US7646471B2Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2007·Granted Jan 12, 2010·246 cites·22 claims
- 0278US6924884B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Aug 2, 2005·23 cites·60 claims
- 0376US7248337B2Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·13 cites·24 claims
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