Inventor · disambiguated record
Chi-Kang Chang
Also filed as: CHANG CHI-KANG
16 granted patents·4 pending applications·47 citations·filing 2003–2025
90Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD13TAIWAN SEMICONDUCTOR MFG4ETERNAL CHEMICAL CO LTD1HSIEH CHI-WEN1LIU CHIA-CHU1
Top patents by PatentIndex Score
20 records- 0195US9946827B2Method and structure for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 17, 2018·15 cites·18 claims
- 0291US8822343B2Enhanced FinFET process overlay markHSIEH CHI-WEN·Filed 2012·Granted Sep 2, 2014·14 cites·13 claims
- 0387US2025322133A1Method and structure for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0486US11010526B2Method and structure for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 18, 2021·2 cites·20 claims
- 0585US8932936B2Method of forming a FinFET deviceLIU CHIA-CHU·Filed 2012·Granted Jan 13, 2015·9 cites·19 claims
- 0678US12412016B2Method and structure for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 9, 2025·0 cites·20 claims
- 0778US7897718B2Acrylated semi-crystalline hyperbranched polyurethane oligomer and preparation method thereofETERNAL CHEMICAL CO LTD·Filed 2006·Granted Mar 1, 2011·4 cites·11 claims
- 0876US2024387708A1Method of manufacturing a semiconductor device and semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0974US11748540B2Method and structure for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 5, 2023·0 cites·20 claims
- 1071US9129974B2Enhanced FinFET process overlay markTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Sep 8, 2015·2 cites·20 claims
- 1168US12154975B2Method of manufacturing a semiconductor device and semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 26, 2024·0 cites·20 claims
- 1265US9793268B2Method and structure for gap filling improvementTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 17, 2017·1 cites·20 claims
- 1362US10521541B2Method and structure for mandrel and spacer patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 1459US11094802B2Method of manufacturing a semiconductor device and semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 17, 2021·0 cites·20 claims
- 1551US10515953B2Method and structure for gap filling improvementTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 24, 2019·0 cites·20 claims
- 1647US2010209852A1Track nozzle system for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
- 1743US9543161B1Method of planarizating filmTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 10, 2017·0 cites·20 claims
- 1842US7223503B2Method for repairing opaque defects on semiconductor mask reticlesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted May 29, 2007·0 cites·20 claims
- 1939US10204867B1Semiconductor metrology target and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Feb 12, 2019·0 cites·20 claims
- 2031US2005260503A1Reticle film stabilizing methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →