Inventor · disambiguated record

Catherine Odor

Also filed as: ODOR CATHERINE

1 granted patent·3 citations·filing 2002–2002

21Inventor score

Technology areasH01J

Files withINFINEON TECHNOLOGIES RICHMOND1

Top patents by PatentIndex Score

1 record

0147US6828249B2System and method for enhanced monitoring of an etch processINFINEON TECHNOLOGIES RICHMOND·Filed 2002·Granted Dec 7, 2004·3 cites·13 claims

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