Inventor · disambiguated record
Orest Bula
Also filed as: BULA OREST
22 granted patents·920 citations·filing 1991–2007
97Inventor score
Files withIBM22
Top patents by PatentIndex Score
22 records- 0197US6016357AFeedback method to repair phase shift masksIBM·Filed 1997·Granted Jan 18, 2000·201 cites·23 claims
- 0294US6425112B1Auto correction of error checked simulated printed imagesIBM·Filed 1999·Granted Jul 23, 2002·235 cites·24 claims
- 0389US6395438B1Method of etch bias proximity correctionIBM·Filed 2001·Granted May 28, 2002·33 cites·20 claims
- 0489US6238850B1Method of forming sharp corners in a photoresist layerIBM·Filed 1999·Granted May 29, 2001·79 cites·12 claims
- 0588US6627361B2Assist features for contact hole mask patternsIBM·Filed 2001·Granted Sep 30, 2003·29 cites·17 claims
- 0685US6373975B1Error checking of simulated printed images with process window effects includedIBM·Filed 1999·Granted Apr 16, 2002·87 cites·25 claims
- 0783US6539321B2Method for edge bias correction of topography-induced linewidth variationIBM·Filed 2001·Granted Mar 25, 2003·22 cites·62 claims
- 0878US7257247B2Mask defect analysis systemIBM·Filed 2002·Granted Aug 14, 2007·13 cites·27 claims
- 0978US6577406B2Structure for lithographic focus control featuresIBM·Filed 2002·Granted Jun 10, 2003·16 cites·20 claims
- 1076US7492941B2Mask defect analysis systemIBM·Filed 2007·Granted Feb 17, 2009·3 cites·23 claims
- 1175US6214494B1Serif mask design methodology based on enhancing high spatial frequency contribution for improved printabilityIBM·Filed 1998·Granted Apr 10, 2001·34 cites·22 claims
- 1275US5317573AApparatus and method for real time data error capture and compression redundancy analysisIBM·Filed 1992·Granted May 31, 1994·44 cites·1 claims
- 1372US7492940B2Mask defect analysis systemIBM·Filed 2007·Granted Feb 17, 2009·2 cites·12 claims
- 1471US6383719B1Process for enhanced lithographic imagingIBM·Filed 1998·Granted May 7, 2002·32 cites·75 claims
- 1566US6704695B1Interactive optical proximity correction design methodIBM·Filed 1999·Granted Mar 9, 2004·24 cites·23 claims
- 1664US6268908B1Micro adjustable illumination apertureIBM·Filed 1999·Granted Jul 31, 2001·22 cites·15 claims
- 1762US6261724B1Method of modifying a microchip layout data set to generate a predicted mask printed data setIBM·Filed 1999·Granted Jul 17, 2001·20 cites·13 claims
- 1861US6667136B2Method to control nested to isolated line printingIBM·Filed 2002·Granted Dec 23, 2003·5 cites·9 claims
- 1952US6429469B1Optical Proximity Correction Structures Having Decoupling CapacitorsIBM·Filed 2000·Granted Aug 6, 2002·5 cites·7 claims
- 2040US6258490B1Transmission control mask utilized to reduce foreshortening effectsIBM·Filed 1999·Granted Jul 10, 2001·6 cites·15 claims
- 2138US6458493B2Method to control nested to isolated line printingIBM·Filed 1999·Granted Oct 1, 2002·4 cites·12 claims
- 2233US5093584ASelf calibrating timing circuitIBM·Filed 1991·Granted Mar 3, 1992·4 cites·10 claims
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