Inventor · disambiguated record

Richard Yamaguchi

Also filed as: YAMAGUCHI RICHARD

2 granted patents·81 citations·filing 2003–2006

60Inventor score

Technology areasG03F

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0190US7070915B2Method and system for drying a substrateTOKYO ELECTRON LTD·Filed 2003·Granted Jul 4, 2006·81 cites·34 claims
0247US7582414B2Method and system for drying a substrateTOKYO ELECTRON LTD·Filed 2006·Granted Sep 1, 2009·0 cites·18 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →