Inventor · disambiguated record
Ronald S. Horwath
Also filed as: HORWATH RONALD S
5 granted patents·587 citations·filing 1985–1998
85Inventor score
Top patents by PatentIndex Score
5 records- 0197US6037664ADual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layerSEMATECH INC·Filed 1998·Granted Mar 14, 2000·306 cites·26 claims
- 0296US6100184AMethod of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layerSEMATECH INC·Filed 1997·Granted Aug 8, 2000·236 cites·12 claims
- 0357US4618477AUniform plasma for drill smear removal reactorIBM·Filed 1985·Granted Oct 21, 1986·16 cites·31 claims
- 0450US4830706AMethod of making sloped viasIBM·Filed 1986·Granted May 16, 1989·18 cites·6 claims
- 0536US4869777AMethod for selectively etching the materials of a composite of two materialsIBM·Filed 1988·Granted Sep 26, 1989·11 cites·6 claims
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