Inventor · disambiguated record
Koumei Matsuzawa
Also filed as: MATSUZAWA KOUMEI
3 granted patents·4 pending applications·6 citations·filing 2003–2007
57Inventor score
Top patents by PatentIndex Score
7 records- 0163US7699945B2Substrate treatment method and film forming method, film forming apparatus, and computer programTOKYO ELECTRON LTD·Filed 2007·Granted Apr 20, 2010·2 cites·7 claims
- 0260US7063871B2CVD process capable of reducing incubation timeTOKYO ELECTRON LTD·Filed 2003·Granted Jun 20, 2006·4 cites·11 claims
- 0339US2006084266A1Film formation methodEIICHI KONDOH·Filed 2005·Application pending·0 cites
- 0438US7456109B2Method for cleaning substrate processing chamberTOKYO ELECTRON LTD·Filed 2003·Granted Nov 25, 2008·0 cites·7 claims
- 0538US2009029047A1Film-forming apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 0638US2006121307A1Film deposition methodEIICHI KONDOH·Filed 2005·Application pending·0 cites
- 0735US2006099348A1Deposition methodEIICHI KONDOH·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →