Inventor · disambiguated record

Vladimir V. Fleurov

Also filed as: FLEUROV VLADIMIR V

1 granted patent·20 citations·filing 2003–2003

39Inventor score

Technology areasH01S

Files withCYMER INC1

Top patents by PatentIndex Score

1 record

0180US6963595B2Automatic gas control system for a gas discharge laserCYMER INC·Filed 2003·Granted Nov 8, 2005·20 cites·28 claims

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