Inventor · disambiguated record
Shigeru Kawata
Also filed as: KAWATA SHIGERU
4 granted patents·2 pending applications·25 citations·filing 1995–2013
71Inventor score
Files withDAIHACHI CHEM IND2MEIKO ELECTRONICS CO LTD1SHIMAI FUTOSHI1TOKYO OHKA KOGYA CO LTD1TOKYO OHKA KOGYO CO LTD1
Top patents by PatentIndex Score
6 records- 0171US5616768AProcess for purifying phosphoric estersDAIHACHI CHEM IND·Filed 1995·Granted Apr 1, 1997·18 cites·12 claims
- 0267US7381270B2Slit nozzle and apparatus for supplying treatment liquid using slit nozzleTOKYO OHKA KOGYA CO LTD·Filed 2005·Granted Jun 3, 2008·2 cites·17 claims
- 0358US8189169B2Cooling apparatus and substrate treating apparatusSHIMAI FUTOSHI·Filed 2008·Granted May 29, 2012·1 cites·18 claims
- 0445US5880308AProcess for preparing aromatic bisphosphatesDAIHACHI CHEM IND·Filed 1996·Granted Mar 9, 1999·4 cites·19 claims
- 0542US2007240642A1Substrate processing apparatusTOKYO OHKA KOGYO CO LTD·Filed 2007·Application pending·0 cites
- 0638US2016016318A1Suction deviceMEIKO ELECTRONICS CO LTD·Filed 2013·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →