Inventor · disambiguated record

Oleg A. Kornilov

Also filed as: KORNILOV OLEG A

1 granted patent·0 citations·filing 2010–2010

10Inventor score

Technology areasG01J

Files withGESSNER OLIVER1

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1 record

0125US8569677B2Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detectorGESSNER OLIVER·Filed 2010·Granted Oct 29, 2013·0 cites·15 claims

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